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Silicon anisotropic etching in alkaline solutions II on the influence of anisotropy on the smoothness of etched surfaces

Irena Zubel

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Key concepts: Hillock, Etching (microfabrication), Anisotropy, Smoothness, Materials science, Surface (topology), Silicon, Point (geometry)

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Silicon anisotropic etching in alkaline solutions II on the influence of anisotropy on the smoothness of etched surfaces — Research Paper | ScholarLens