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Evaluation of surface hydrogen desorption from Si–H terminated Si(100) surfaces by thermal desorption spectroscopy

Fumihiko Hirose, Hitoshi Sakamoto

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Key concepts: Desorption, Thermal desorption spectroscopy, Thermal desorption, Hydrogen, Analytical Chemistry (journal), Soft laser desorption, Activation energy, Chemistry

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Evaluation of surface hydrogen desorption from Si–H terminated Si(100) surfaces by thermal desorption spectroscopy — Research Paper | ScholarLens