2009•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access
Interfaces roughness cross correlation properties and light scattering of optical thin films
Yongqiang Pan, Zhensen Wu, Ling-xia Hang
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Abstract
In order to study optical thin films interfaces roughness cross correlation properties and light scattering, theoretical models of optical thin films interfaces roughness light scattering are concisely presented. Furthermore, influence of interfaces roughness cross-correlation properties to light scattering was analyzed by total backscattering. Moreover, TiO2 single optical films thickness, substrate roughness of K9 glass and ion beam assisted deposition (IBAD) technique effect on interface roughness cross correlation properties were studied by experiments, respectively. The results showed that theoretical results obtained by integrating vector light scattering were agreed well with experimental results. The interfaces roughness cross-correlation decrease with the increase of films thickness or with the decrease of substrates roughness. When ion beam assisted deposition was used, a high degree of cross-correlated can be obtained.