Aberration Correction with Electron Mirrors
E. G. Ramberg
Abstract
E. G. Ramberg
Abstract
Both the spherical and the chromatic aberration of electron microscope objectives may, in principle, be corrected with the aid of a uniform retarding field acting as a mirror. Such an arrangement has the drawback of requiring a conducting film in the ray path and the insertion of the specimen in a region of high field strength. The employment of concave electron mirrors with concentrated field distribution, forming a real image of approximately unity magnification, is free from this drawback. The formulas for spherical and chromatic aberration, presented in a form suitable for calculation, are applied to a characteristic electron mirror field of this type (Φ = C+tanh(sinhz)). It is found that the aberration coefficients of the mirror are so large, however, that this method of aberration correction encounters serious practical difficulties.
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Both the spherical and the chromatic aberration of electron microscope objectives may, in principle, be corrected with the aid of a uniform retarding field acting as a mirror. Such an arrangement has the drawback of requiring a conducting film in the ray path and the insertion of the specimen in a region of high field strength. The employment of concave electron mirrors with concentrated field distribution, forming a real image of approximately unity magnification, is free from this drawback. The formulas for spherical and chromatic aberration, presented in a form suitable for calculation, are applied to a characteristic electron mirror field of this type (Φ = C+tanh(sinhz)). It is found that the aberration coefficients of the mirror are so large, however, that this method of aberration correction encounters serious practical difficulties.
Key concepts: Spherical aberration, Chromatic aberration, Contrast transfer function, Optics, Magnification, Optical aberration, Electron optics, Physics