REBIC-SEM characterisation of compound semiconductors
Gennady N. Panin, Eugene B. Yakimov
Abstract
Gennady N. Panin, Eugene B. Yakimov
Abstract
The possibilities of remote contact EBIC (REBIC) for semiconductor characterisation are discussed. Results of investigations on CdTe, PbTe and HgCdTe crystals are presented. It is shown that this technique is very suitable for in situ investigations of electron beam effects on semiconductor properties.
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The possibilities of remote contact EBIC (REBIC) for semiconductor characterisation are discussed. Results of investigations on CdTe, PbTe and HgCdTe crystals are presented. It is shown that this technique is very suitable for in situ investigations of electron beam effects on semiconductor properties.
Key concepts: Semiconductor, Cadmium telluride photovoltaics, Compound semiconductor, Semiconductor materials, Materials science, Optoelectronics, Scanning electron microscope, Electron beam-induced current