1992•Semiconductor Science and TechnologyRequires access

REBIC-SEM characterisation of compound semiconductors

Gennady N. Panin, Eugene B. Yakimov

Open publisher page 13 citations

Abstract

The possibilities of remote contact EBIC (REBIC) for semiconductor characterisation are discussed. Results of investigations on CdTe, PbTe and HgCdTe crystals are presented. It is shown that this technique is very suitable for in situ investigations of electron beam effects on semiconductor properties.

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What this paper is about

The possibilities of remote contact EBIC (REBIC) for semiconductor characterisation are discussed. Results of investigations on CdTe, PbTe and HgCdTe crystals are presented. It is shown that this technique is very suitable for in situ investigations of electron beam effects on semiconductor properties.

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OpenAlex reports 13 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

The possibilities of remote contact EBIC (REBIC) for semiconductor characterisation are discussed. Results of investigations on CdTe, PbTe and HgCdTe crystals are presented. It is shown that this technique is very suitable for in situ investigations of electron beam effects on semiconductor properties.

Key concepts: Semiconductor, Cadmium telluride photovoltaics, Compound semiconductor, Semiconductor materials, Materials science, Optoelectronics, Scanning electron microscope, Electron beam-induced current

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