2011•Biomedical MicrodevicesOpen access

Microelectrode arrays fabricated using a novel hybrid microfabrication method

Mark Merlo, Russell L. Snyder, John C. Middlebrooks, Mark Bachman

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Key concepts: Microelectrode, Microfabrication, Materials science, Multielectrode array, Electrode, Microelectromechanical systems, Surface micromachining, Fabrication

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Microelectrode arrays fabricated using a novel hybrid microfabrication method — Research Paper | ScholarLens