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Selective-area atomic layer deposition with microcontact printed self-assembled octadecyltrichlorosilane monolayers as mask layers

Elina Färm, Marianna Kemell, Mikko Ritala, Markku A. Leskelä

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Key concepts: Octadecyltrichlorosilane, Microcontact printing, Monolayer, Materials science, Atomic layer deposition, Iridium, Contact angle, Silicon

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Selective-area atomic layer deposition with microcontact printed self-assembled octadecyltrichlorosilane monolayers as mask layers — Research Paper | ScholarLens