2014•Unpublished venueOpen access

A lateral modes model for BAW resonators

Carlos Collado, Eduard Rocas, Jordi Verdú, Jordi Mateu, Alberto Hueltes, Robert Aigner

Abstract

An equivalent circuit model to predict lateral modes occurring in real BAW resonators is proposed. The circuit model has been validated with FEM simulations of FBAR resonators and also with measurements of SMR resonators. The model allows to predict the electrical response of square-shaped and rectangular-shaped resonators without limitation on dimensions.

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Available abstract

Key concepts: Resonator, Equivalent circuit, Acoustics, Finite element method, Square (algebra), Electrical element, Materials science, Electronic engineering