1993•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access
High-resolution fast-response profilometer based on active stabilized interferometry
Fumio Murakami
Open publisher page 1 citations
Abstract
A noncontact surface profiling technique based on active-stabilized interferometry is described. Direct frequency monitoring by the reference interferometer connected parallel to the sensing interferometer provides high accuracy in nanometer resolution measurement.