2000•Journal of Crystal GrowthRequires access

Comparison of AlN thin films grown on sapphire and cubic-SiC substrates by LP-MOCVD

Y. Tanaka, Yuji Hasebe, Takashi Inushima, Adarsh Sandhu, S Ohoya

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Key concepts: Sapphire, Metalorganic vapour phase epitaxy, Hexagonal crystal system, Materials science, Substrate (aquarium), Plane (geometry), Epitaxy, Thin film

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Comparison of AlN thin films grown on sapphire and cubic-SiC substrates by LP-MOCVD — Research Paper | ScholarLens