ScholarLens Back to search
1994•Review of Scientific InstrumentsRequires access

The Beijing metal vapor vacuum arc ion source program

Zhang Huixing, Xiaoji Zhang, Zhou Fengsheng, Zhang Shenji, Qiang Li, Han Zhuen

Open publisher page 8 citations

Abstract

Work on metal vapor vacuum arc (MEVVA) ion source development was initiated at the Institute of Low Energy Nuclear Physics, Beijing Normal University, in 1988. MEVVA ion sources I, II, IIA, and III have been designed, fabricated, and tested, and an ion implantation facility with three MEVVA ion sources has been developed and is now undergoing testing. Here the status of the MEVVA ion source research and development program is described.

About this research paper

What this paper is about

Work on metal vapor vacuum arc (MEVVA) ion source development was initiated at the Institute of Low Energy Nuclear Physics, Beijing Normal University, in 1988. MEVVA ion sources I, II, IIA, and III have been designed, fabricated, and tested, and an ion implantation facility with three MEVVA ion sources has been developed and is now undergoing testing. Here the status of the MEVVA ion source research and development program is described.

Why it matters

OpenAlex reports 8 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

Work on metal vapor vacuum arc (MEVVA) ion source development was initiated at the Institute of Low Energy Nuclear Physics, Beijing Normal University, in 1988. MEVVA ion sources I, II, IIA, and III have been designed, fabricated, and tested, and an ion implantation facility with three MEVVA ion sources has been developed and is now undergoing testing. Here the status of the MEVVA ion source research and development program is described.

Key concepts: Vacuum arc, Ion source, Materials science, Beijing, Ion, Work (physics), Atomic physics, Nuclear engineering

Related papers

Related paper 1Related paper 2
Back to paper searchBrowse research topicsOriginal source
The Beijing metal vapor vacuum arc ion source program — Research Paper | ScholarLens