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2010•Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated EquipmentRequires access

Characterization of compact ICP ion source for focused ion beam applications

P.Y. Nabhiraj, Ranjini Menon, G. Mohan Rao, S. Mohan, Rakesh Bhandari

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Key concepts: Faraday cup, Ion source, Ion beam deposition, Ion gun, Ion beam, Ion, Brightness, Thermal emittance

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