Development of Multichannel Ellipsometry with Synchronously Rotating Polarizer and Analyzer

Rotating-polarizer-and-analyzer-ellipsometry was developed with a multichannel detector. In this system, the transmission axes of the polarizer and analyzer rotated in phase using a flexible shaft for mechanical connection. With this configuration, autocalibration for the azimuths of the polarizer and analyzer was achieved. Thus, experimental error related to the calibration could be avoided and spectroscopic ellipsometry with the simplest operation principle was realized. Data acquisition time for 512-point ellipsometry spectra was 3 s over the photon energy range of 1.5 to 4.5 eV.