1996•Surface and Coatings TechnologyRequires access

Development of a plasma immersion ion implanter for the surface treatment of metal components

George Collins, R. Hutchings, K. T. Short, J. Tendys, C.H. Van Der Valk

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Key concepts: Plasma-immersion ion implantation, Ion implantation, Materials science, Nitriding, Plasma, Surface modification, Immersion (mathematics), Ion

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