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2003•Applied Physics ARequires access

Influence of the oxidation temperature on the fabrication process of silicon dioxide aperture tips

A. Vollkopf, O. Rudow, M. M�ller-Wiegand, Georgi T. Georgiev, Egbert Oesterschulze

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Key concepts: Silicon dioxide, Thermal oxidation, Silicon, Trench, Oxide, Oxidation process, Materials science, Fabrication

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