2008•Materials Science and Engineering BRequires access

On the analysis of the activation mechanisms of sub-melt laser anneals

Trudo Clarysse, Janusz Bogdanowicz, Jozefien Goossens, Alain Moussa, Erik Rosseel, Wilfried Vandervorst, Dirch Hjorth Petersen, Rong Ming Lin, Peter F. Nielsen, Ole Per Hansen, Gregory T. Merklin, Nick S. Bennett, Nick E. B. Cowern

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Key concepts: Sheet resistance, Dopant Activation, Van der Pauw method, Dopant, Materials science, Optoelectronics, Electron mobility, Spreading resistance profiling

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