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Pyroelectric properties of sol-gel-derived (Pb,Mg)TiO 3 thin film detectors

Ying‐Chung Chen, Chih-Ming Wang, Ming‐Cheng Kao, Yun-Hsing Lai

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Abstract

High-performance pyroelectric infrared (IR) detectors have been fabricated without the back side etching process using Mg-modified lead titanate (Pb1-xMgxTiO3) thin films. PMT thin films were deposited on (111)-oriented Pt thin film on SiO2/Si(100) substrates by a diol-based sol-gel process. The randomly oriented PMT thin film exhibits a relatively small dielectric constant and a large pyroelectric coefficient without poling treatment. The pyroelectric characteristics of point detector with various Mg contents as a function of modulation frequency are compared. It was found that the PMT(6) thin film detector has a large voltage responsivity of 5280 (V/W) at 20 Hz. The specific detectivity (D*) at 100 Hz is 5.12 X 107 cmHz1/2/W. The results showed that Pb1-xMgxTiO3 thin film with x equals 0.06 [PMT(6)] was most suitable for use as a pyroelectric IR detector.

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High-performance pyroelectric infrared (IR) detectors have been fabricated without the back side etching process using Mg-modified lead titanate (Pb1-xMgxTiO3) thin films. PMT thin films were deposited on (111)-oriented Pt thin film on SiO2/Si(100) substrates by a diol-based sol-gel process. The randomly oriented PMT thin film exhibits a relatively small dielectric constant and a large pyroelectric coefficient without poling treatment. The pyroelectric characteristics of point detector with various Mg contents as a function of modulation frequency are compared. It was found that the PMT(6) thin film detector has a large voltage responsivity of 5280 (V/W) at 20 Hz. The specific detectivity (D*) at 100 Hz is 5.12 X 107 cmHz1/2/W. The results showed that Pb1-xMgxTiO3 thin film with x equals 0.06 [PMT(6)] was most suitable for use as a pyroelectric IR detector.

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Available abstract

High-performance pyroelectric infrared (IR) detectors have been fabricated without the back side etching process using Mg-modified lead titanate (Pb1-xMgxTiO3) thin films. PMT thin films were deposited on (111)-oriented Pt thin film on SiO2/Si(100) substrates by a diol-based sol-gel process. The randomly oriented PMT thin film exhibits a relatively small dielectric constant and a large pyroelectric coefficient without poling treatment. The pyroelectric characteristics of point detector with various Mg contents as a function of modulation frequency are compared. It was found that the PMT(6) thin film detector has a large voltage responsivity of 5280 (V/W) at 20 Hz. The specific detectivity (D*) at 100 Hz is 5.12 X 107 cmHz1/2/W. The results showed that Pb1-xMgxTiO3 thin film with x equals 0.06 [PMT(6)] was most suitable for use as a pyroelectric IR detector.

Key concepts: Pyroelectricity, Specific detectivity, Thin film, Materials science, Responsivity, Analytical Chemistry (journal), Dielectric, Poling

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