1983•Thin Solid FilmsRequires access

Processes of the activated reactive evaporation type and their tribological applications

R.F. Bunshah

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Key concepts: Ion plating, Evaporation, Electron beam physical vapor deposition, Sputtering, Deposition (geology), Plasma processing, Physical vapor deposition, Materials science

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Processes of the activated reactive evaporation type and their tribological applications — Research Paper | ScholarLens