2004•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access

Evaluation of thermal loading effects of laser Doppler vibrometer applied to micro-electro-mechanical systems (MEMS)

Ferdinando Cannella, Barbara Marchetti

Abstract

The aim of this research is to evaluate the effect of the interaction between the Laser Doppler Vibrometer and the sample in the microscale. In particular the attention will be focused in the numerical and experimental evaluation of the heating effect due to the laser beam power. The consequent temperature variation will be related to the measurement results in terms of resonance frequencies and vibrational modes determination.

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Available abstract

Key concepts: Laser Doppler vibrometer, Laser scanning vibrometry, Microscale chemistry, Microelectromechanical systems, Materials science, Laser Doppler velocimetry, Laser, Doppler effect