1999•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access

New deep-UV microscope

Naoya Eguchi, Michio Oka, Yutaka Imai, Masaki Saito, Shigeo R. Kubota

Abstract

We report a deep-UV microscope having the best resolution of any optical microscope. The resolution limit is less than 0.1 micron, which is close to the resolution limit of a scanning electron microscope (SEM). Moreover, measurement without vacuum chamber is possible using the new deep-UV microscope. The deep-UV microscope is suitable for inspecting semiconductors, magnetic heads and optical disks.

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Available abstract

Key concepts: Microscope, Optical microscope, 4Pi microscope, Electron microscope, Scanning electron microscope, Resolution (logic), Materials science, Optics