1995•Spectrochimica Acta Part B Atomic SpectroscopyRequires access

Application of a tuned Langmuir probe for the diagnostic study of radio frequency glow discharges: instrumentation and theory

Yuancai Ye, R. Kenneth Marcus

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Key concepts: Langmuir probe, Plasma, Plasma diagnostics, Glow discharge, Atomic physics, Radio frequency, Electron density, Electron

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