Inorganic speciation in static SIMS: a comparative study between monatomic and polyatomic primary ions
Rita Van Ham, Luc Van Vaeck, Annemie Adriaens, F. Adams, Brittany Hodges, Gary S. Groenewold
Abstract
Rita Van Ham, Luc Van Vaeck, Annemie Adriaens, F. Adams, Brittany Hodges, Gary S. Groenewold
Abstract
This paper addresses the use of static SIMS (S-SIMS) for the speciation of inorganic compounds. Specifically, the use of SF5+ and ReO4− polyatomic primary ions for the analysis of binary salts is compared to bombardment with Ga+. The features of the mass spectra are discussed with respect to the gain in secondary ion intensity and the increased production of molecule-specific adduct ions and structural fragments when using polyatomic instead of monatomic ion bombardment.
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This paper addresses the use of static SIMS (S-SIMS) for the speciation of inorganic compounds. Specifically, the use of SF5+ and ReO4− polyatomic primary ions for the analysis of binary salts is compared to bombardment with Ga+. The features of the mass spectra are discussed with respect to the gain in secondary ion intensity and the increased production of molecule-specific adduct ions and structural fragments when using polyatomic instead of monatomic ion bombardment.
Key concepts: Monatomic ion, Polyatomic ion, Chemistry, Ion, Primary (astronomy), Molecule, Mass spectrum, Adduct