2005•Seimitsu kougakkaishi rombunshuu/Seimitsu kougakkaishi/Seimitsu Kougakkaishi rombunshuuOpen access

Development of a Method for Multi-Surface Interferometry by a Wavelength Scanning Interferometer

Ryohei Hanayama, Kenichi Hibino, Jan Burke, Bozenko F. Oreb, Shin’ichi Warisawa, Mamoru Mitsuishi

Abstract

波長走査干渉計にて, 任意の高調波信号の位相を検出可能であり, 波長走査の非線形性などによる周波数変調誤差に対する補償能力を有する位相検出アルゴリズムを開発した. これにより, 複数の透明で両面が平行な層からなる積層試料の, 各界面の形状と各層の光学的厚さ変動を, 不確かさ1/10以下で同時に測定可能であることを示した.

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Available abstract

Key concepts: Interferometry, Optics, Wavelength, Surface (topology), Materials science, Physics, Mathematics, Geometry