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Piezoelectrically driven rotary stage for use in ultrahigh vacuum

E. de Haas, W. Barsingerhorn, J. F. van der Veen

Open publisher page 7 citations

Abstract

We have developed a compact high-precision rotary stage for use in ultrahigh vacuum. Its drive mechanism incorporates along its circumference two sets of diametrically opposed piezoelectric devices with combined clamping and pushing action. The maximum torque load is 0.7 Nm. The rotation is bidirectional over 360° and proceeds in steps down to 1 mdeg at a maximum speed of one revolution per 2 min.

About this research paper

What this paper is about

We have developed a compact high-precision rotary stage for use in ultrahigh vacuum. Its drive mechanism incorporates along its circumference two sets of diametrically opposed piezoelectric devices with combined clamping and pushing action. The maximum torque load is 0.7 Nm. The rotation is bidirectional over 360° and proceeds in steps down to 1 mdeg at a maximum speed of one revolution per 2 min.

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OpenAlex reports 7 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

We have developed a compact high-precision rotary stage for use in ultrahigh vacuum. Its drive mechanism incorporates along its circumference two sets of diametrically opposed piezoelectric devices with combined clamping and pushing action. The maximum torque load is 0.7 Nm. The rotation is bidirectional over 360° and proceeds in steps down to 1 mdeg at a maximum speed of one revolution per 2 min.

Key concepts: Clamping, Rotation (mathematics), Piezoelectricity, Stage (stratigraphy), Torque, Circumference, Control theory (sociology), Mechanical engineering

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