Research of the PZT Polarization for Deformable Mirror
Junjie Chen, Ying Liu, Jian Qiang, Ji Deng, Bao Qing Li, Jia Ru Chu
Abstract
Junjie Chen, Ying Liu, Jian Qiang, Ji Deng, Bao Qing Li, Jia Ru Chu
Abstract
This paper demonstrates that the deformation of the piezoelectric deformable mirror (DM) is proportional to the transverse piezoelectric coefficient of the lead zirconate titanate (PZT) by the theoretical analysis. The optimal polarization conditions were obtained by experiments to optimize the performance of the DM. After the optimal polarization, the transverse piezoelectric coefficient of the PZT film increases from 350 pm/V to 431 pm/V, which will improve the deformation of the DM.
OpenAlex reports 1 citations for this work. Citation counts describe recorded attention and do not establish research quality.
A contribution statement is not available in the OpenAlex record.
Method details are not available in the OpenAlex metadata.
Findings are not separately available in the OpenAlex metadata.
Limitations are not available in the OpenAlex metadata.
Application details are not available in the OpenAlex metadata.
This paper demonstrates that the deformation of the piezoelectric deformable mirror (DM) is proportional to the transverse piezoelectric coefficient of the lead zirconate titanate (PZT) by the theoretical analysis. The optimal polarization conditions were obtained by experiments to optimize the performance of the DM. After the optimal polarization, the transverse piezoelectric coefficient of the PZT film increases from 350 pm/V to 431 pm/V, which will improve the deformation of the DM.
Key concepts: Lead zirconate titanate, Piezoelectricity, Materials science, Polarization (electrochemistry), Piezoelectric coefficient, Transverse plane, Composite material, Ferroelectricity