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Oxidation behavior of Al-W alloy films deposited on Cu as a passivation layer

Mayumi B. Takeyama, Takaaki Ichikawa, Atsushi Noya

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Key concepts: Passivation, X-ray photoelectron spectroscopy, Auger electron spectroscopy, Alloy, Layer (electronics), Materials science, Electron spectroscopy, Metallurgy

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Oxidation behavior of Al-W alloy films deposited on Cu as a passivation layer — Research Paper | ScholarLens