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2014•Unpublished venueRequires access

Integration of PZT thin films on a microfluidic complex system

P.-H. Cazorla, Olivier Fuchs, Martine Cochet, S. Maubert, G. Le Rhun, Yves Fouillet, Emmanuel Defaÿ

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Abstract

We present a new way to integrate state of the art sol-gel Pb(Zr,Ti)O3(PZT) thin-films on a microfluidic system and the first peristaltic micropump with active microvalves actuated by piezoelectric thin-films. Combination of both technologies enables to benefit of low voltage actuation and high precision. The micropump can produce a 3.6 µl/min flow for 24 V actuation voltage. It is a new step toward low consuming pumps for autonomous microfluidic systems, especially implanted devices for drug delivery.

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What this paper is about

We present a new way to integrate state of the art sol-gel Pb(Zr,Ti)O3(PZT) thin-films on a microfluidic system and the first peristaltic micropump with active microvalves actuated by piezoelectric thin-films. Combination of both technologies enables to benefit of low voltage actuation and high precision. The micropump can produce a 3.6 µl/min flow for 24 V actuation voltage. It is a new step toward low consuming pumps for autonomous microfluidic systems, especially implanted devices for drug delivery.

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OpenAlex reports 14 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

We present a new way to integrate state of the art sol-gel Pb(Zr,Ti)O3(PZT) thin-films on a microfluidic system and the first peristaltic micropump with active microvalves actuated by piezoelectric thin-films. Combination of both technologies enables to benefit of low voltage actuation and high precision. The micropump can produce a 3.6 µl/min flow for 24 V actuation voltage. It is a new step toward low consuming pumps for autonomous microfluidic systems, especially implanted devices for drug delivery.

Key concepts: Micropump, Microfluidics, Materials science, Nanotechnology, Thin film, Voltage, Piezoelectricity, Drug delivery

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