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2006•Microscopy and MicroanalysisOpen access

Sub-80 nm Resolution X-Ray Fluorescence Imaging Spectrometer for Semiconductor Applications

Srivatsan Seshadri, Wu Yun, Michael Feser, Fred Duewer, S Wang

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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

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What this paper is about

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Why it matters

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Available abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Key concepts: Spectrometer, Microanalysis, Materials science, Resolution (logic), Microscopy, Optics, Semiconductor, X-ray fluorescence

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