1985•Chinese Physics LettersRequires access

Thermal desorption study of deuterium on Si(100) surface

Jihuang Hu, Keming Chen, Xingen Hu, ZHUANG CHENG-QUN, Wang Xun

Abstract

The thermal desorption spectra study of deuterium on Si(100) surface shows that two adsorption states the monodeuteride phase and the dideuteride phase can be formed. The activation energies of desorption for these two phases have been measured and a comparison with the hydrogen adsorption on Si(100) surface has been made.

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Key concepts: Deuterium, Desorption, Adsorption, Thermal desorption, Materials science, Hydrogen, Thermal, Phase (matter)