2009•한국진공학회 학술발표회초록집Requires access

Effects of In-Situ Annealed Buffer Layers in Oxygen Plasma on Properties of ZnO Epitaxial Layers Grown by Plasma-Assisted Molecular Beam Epitaxy

Min Su Kim, Do Yeob Kim, Ghun Sik Kim, Hyun Young Choi, Min Young Cho, Su Min Jeon, Kwang Gug Yim, Ji Hoon Kim, Dong-Yul Lee, Joo In Lee, Sung Dong Park, Eundo Kim, Myong Hyo Jung, Do-Weon Hwang, Jae‐Young Leem

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Key concepts: Molecular beam epitaxy, Epitaxy, Plasma, Materials science, In situ, Buffer (optical fiber), Annealing (glass), Oxygen

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Effects of In-Situ Annealed Buffer Layers in Oxygen Plasma on Properties of ZnO Epitaxial Layers Grown by Plasma-Assisted Molecular Beam Epitaxy — Research Paper | ScholarLens