S.E. Huq, Min Huang, Peter R. Wilshaw, Philip D. Prewett
Abstract
Polycrystalline silicon is currently being investigated as the cathode material for flat panel displays using field emission. Conventional silicon microfabrication techniques have been adapted to produce highly uniform arrays of gridded polysilicon field emitters.
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Polycrystalline silicon is currently being investigated as the cathode material for flat panel displays using field emission. Conventional silicon microfabrication techniques have been adapted to produce highly uniform arrays of gridded polysilicon field emitters.
Key concepts: Microfabrication, Polycrystalline silicon, Silicon, Materials science, Fabrication, Field electron emission, Optoelectronics, Cathode