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HeMT소자 공정 연구 - Part 2. HEMT 구조에서의 Ohmic 접촉저항 ( A Study on HEMT Device Process - Part 2. Ohmic Contact Resistance in GaAs/AlGaAs Hetero-Structure )

이종람, 이재진, 박성호, 김진섭, 마동성

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Key concepts: Ohmic contact, High-electron-mobility transistor, Optoelectronics, Contact resistance, Materials science, Electrical engineering, Engineering, Nanotechnology

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HeMT소자 공정 연구 - Part 2. HEMT 구조에서의 Ohmic 접촉저항 ( A Study on HEMT Device Process - Part 2. Ohmic Contact Resistance in GaAs/AlGaAs Hetero-Structure ) — Research Paper | ScholarLens