2002•Unpublished venueRequires access

Characterization of growth and thermal behaviors of thin films for the advanced gate stack grown by chemical vapor deposition

Taek Soo Jeon

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Key concepts: Characterization (materials science), Chemical vapor deposition, Stack (abstract data type), Materials science, Thin film, Deposition (geology), Thermal, Combustion chemical vapor deposition

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Characterization of growth and thermal behaviors of thin films for the advanced gate stack grown by chemical vapor deposition — Research Paper | ScholarLens