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Modèles de métrologie virtuelle pour prédire les mesures physiques dans la fabrication de semi-conducteurs

Ariane Ferreira Porto Rosa, Agnès Roussy, Lamine Condé

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Abstract

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Available abstract

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Key concepts: Metrology, Semiconductor device fabrication, Wafer fabrication, Fabrication, Wafer, Engineering, Computer science, Manufacturing engineering

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Modèles de métrologie virtuelle pour prédire les mesures physiques dans la fabrication de semi-conducteurs — Research Paper | ScholarLens