1992•Unpublished venueRequires access

Basic Wavefront Aberration Theory for Optical Metrology

James C. Wyant, Katherine Creath

Abstract

VIII. IX. X. XI. XII. Sign Conventions Aberration-Free Image Spherical Wavefront, Defocus, and Lateral Shift Angular, Transverse, and Longitudinal Aberration Seidel Aberrations A. Spherical Aberration B. Coma C. Astigmatism D. Field Curvature E. Distortion Zernike Polynomials Relationship between Zernike Polynomials and Third-Order Aberrations Peak-to-Valley and RMS Wavefront Aberration Strehl Ratio Chromatic Aberrations Aberrations Introduced by Plane Parallel Plates Aberrations of Simple Thin Lenses 2 4 9 12 15 18 22 24 26 28 28

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Key concepts: Strehl ratio, Zernike polynomials, Wavefront, Coma (optics), Spherical aberration, Optics, Optical aberration, Astigmatism