Study of the plasma plume created during the interaction between a KrF laser beam and a graphite target

The plasma plume created during the interaction between a graphite target and a KrF laser beam (248 nm) has been investigated using three different experimental methods: ion detection, time and spatially resolved emission spectroscopy, and double Langmuir probe. Measurements give information on the time‐of‐flight velocity and energetic distribution of ionic species, and on the electronic density within the plasma plume. Moreover, results concerning the properties of the as deposited carbon films on 〈100〉Si substrates are presented and correlated with characteristics of the plasma plume.