ScholarLens Back to search
2002•Applied Physics LettersRequires access

Epitaxial ferroelectric Pb(Zr, Ti)O3 thin films on Si using SrTiO3 template layers

Yu Wang, C. S. Ganpule, B. T. Liu, Hua Li, Katsumi Mori, B. K. Hill, Manfred R. Wuttig, R. Ramesh, J. Finder, Zhiyi Yu, Ravindranath Droopad, Kurt Eisenbeiser

Open publisher page 137 citations

Abstract

In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr, Ti)O3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d33 coefficients compared to textured and untextured polycrystalline films.

About this research paper

What this paper is about

In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr, Ti)O3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d33 coefficients compared to textured and untextured polycrystalline films.

Why it matters

OpenAlex reports 137 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr, Ti)O3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d33 coefficients compared to textured and untextured polycrystalline films.

Key concepts: Epitaxy, Materials science, Ferroelectricity, Crystallite, Heterojunction, Thin film, Piezoelectricity, Perovskite (structure)

Related papers

Related paper 1Related paper 2Related paper 3
Back to paper searchBrowse research topicsOriginal source
Epitaxial ferroelectric Pb(Zr, Ti)O3 thin films on Si using SrTiO3 template layers — Research Paper | ScholarLens