Comparison of the electrical activation of P+ and N+ ions co-implanted along with Si+ or C+ ions into 4H-SiC

The annealing behavior of P+ and N+ ions implanted into p-type 4H-SiC epilayers is studied by a temperature-dependent Hall-effect. Detailed investigations reveal that the electrical activation of implanted P+ ions is governed by the site competition effect, while implanted N+ ions react with intrinsic defects during the annealing step and can form thermally stable and electrically inactive complexes. In this way, the electrical activation of implanted N+ ions is strongly reduced.