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1999•Unpublished venueRequires access

Fabrication of the Si/Al2O3/SiO2/Si Structure by Using the O2 Annealed Al2O3/Si Structure

Hirotsugu Hori, Fumitaka Kondo, Daisuke Akai, Kazuaki Sawada, Mákoto Ishida

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Key concepts: Materials science, Fabrication, Crystallography, Annealing (glass), Silicon, Metallurgy, Chemistry, Medicine

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