Generation of Ozone by Ns-width Pulsed Power

The demand of ozone will be increasing for wholesome and environment‐conscious sterilizations. The generation of ozone using the pulsed power discharge will apply electron accelerations around the head of streamer discharge principally. The breakdown in reactor often limits the efficient generation. Therefore, the pulse shape should be controlled for dimension of the reactor. It is clear that a pulse shortening is one of effective approaches. Pulsed power voltage with ns‐width applies for ozone generation. The effects, on concentration and efficiency of generation, of pulse shape, repetition rate of pulse, flow rate of oxygen gas, and dimension and configuration of reactor, are discussed. The dimension and configuration of the reactor are optimized for the pulse width.