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X-Ray Energy Spectrometry in the 0.1 to 10 Å Range

Ray W. Fitzgerald, P. Gantzel

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Abstract

Energy spectrometry utilizing a solid-state detector (silicon) for X-ray elemental analysis is described, and compared with wavelength spectrometry. Parameters which influence the spectrometers energy resolution, energy detection range, and countrate capabilities are reviewed. Measured performance of a spectrometer (200 eV FWHM resolution for 6.404 keV radiation) is demonstrated for both X-ray and electron specimen excitation.

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What this paper is about

Energy spectrometry utilizing a solid-state detector (silicon) for X-ray elemental analysis is described, and compared with wavelength spectrometry. Parameters which influence the spectrometers energy resolution, energy detection range, and countrate capabilities are reviewed. Measured performance of a spectrometer (200 eV FWHM resolution for 6.404 keV radiation) is demonstrated for both X-ray and electron specimen excitation.

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Available abstract

Energy spectrometry utilizing a solid-state detector (silicon) for X-ray elemental analysis is described, and compared with wavelength spectrometry. Parameters which influence the spectrometers energy resolution, energy detection range, and countrate capabilities are reviewed. Measured performance of a spectrometer (200 eV FWHM resolution for 6.404 keV radiation) is demonstrated for both X-ray and electron specimen excitation.

Key concepts: Spectrometer, Mass spectrometry, Resolution (logic), Full width at half maximum, Range (aeronautics), Materials science, Detector, Silicon

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