The Chemistry of Metal CVD
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Abstract
Author information unavailable
Abstract
CVD of aluminium tungsten copper from Cu(II) percursors copper from Cu(I) precursors gold and silver platinum, pallaium, and nickel assorted metals.
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CVD of aluminium tungsten copper from Cu(II) percursors copper from Cu(I) precursors gold and silver platinum, pallaium, and nickel assorted metals.
Key concepts: Chemistry, Metal, Environmental chemistry, Nanotechnology, Materials science, Organic chemistry