Chunhui Huang, Daniel W. Hewak, John V. Badding
Abstract
Germanium sulphide glass has been deposited on CaF2 and Schott N-PSK58 glass substrates directly by chemical vapour deposition (CVD). The CVD process has shown the high potential for germanium sulphide glass planar waveguides fabrication.
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Germanium sulphide glass has been deposited on CaF2 and Schott N-PSK58 glass substrates directly by chemical vapour deposition (CVD). The CVD process has shown the high potential for germanium sulphide glass planar waveguides fabrication.
Key concepts: Germanium, Chemical vapor deposition, Materials science, Planar, Fabrication, Germanium compounds, Deposition (geology), Optoelectronics