Light Element Analysis Using the Semiconductor X-ray Energy Spectrometer with Electron Excitation

Limitations on light element analysis include the low fluorescent yield of low atomic number elements and the interference of closely spaced K-lines and the L- and M-lines of heavier elements. The paper discusses the relative contributions of electronic noise and statistical line width for low-energy X-rays and the effect of detector window thickness, along with the possibility of reducing or eliminating the window. Optimum accelerating voltages for light elements are calculated, and the importance of takeoff angle is stressed. Examples are given of the minimum detectable limits obtainable at the present state of the art; the possibilities for development in the near future are discussed.